
| Configuration | Function |
|---|---|
|
Nano & Femto Laser Slit & GSM Optic |
Short - Laser Cutting TFT Pattern Defect |
|
Dual drive gantry system Glass Stage AOI & Auto Repair 100X & 50X HR Lens |
Optional laser configuration (Wave length, Pulse width & Etc) Min cutting width: <1um, Max cutting width: < 50 um Selective cutting by layer by selecting pulse wid |